Perspective on Si negative potential dissolution mechanism

Electrochemical and Solid-State Letters

Volumn 7, Issue 8, 2004, Pages

  Starosvetsky, D ^a   Kovler, M ^a,b   Ein Eli, Y ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

^b TOWER SEMICONDUCTOR LTD   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; DISSOLUTION; ELECTRIC POTENTIAL; ELECTROLYTES; ETCHING; LIGHT POLARIZATION;

CATHODIC POLARIZATION; ETCHING RATE; NEGATIVE POTENTIAL; PERISTALTIC PUMPS;

SILICON;

EID: 4344641802     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1766252     Document Type: Article

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