Micro-assembly for top-down nanotechnology

Proceedings of the International Symposium on Micro Machine and Human Science

Volumn , Issue , 2000, Pages 3-9

  Skidmore, George D ^a   Ellis, Matthew ^a   Parker, Eric ^a   Sarkar, Neil ^a   Merkle, Ralph ^a  

^a Zyvex Labs   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASSEMBLY; INTEGRATED CIRCUIT MANUFACTURE; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; SEMICONDUCTOR DEVICE MANUFACTURE;

MICROASSEMBLY; MICROELECTROMECHANICAL SYSTEMS;

MICROELECTRONIC PROCESSING;

EID: 0034590076     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)

1. D.M. Eigler, E.K. and Schweizer, "Positioning single atoms with a scanning tunnelling microscope." Nature 344, pp. 524-526, 1990.
2. H.J. Lee, W. and Ho, "Single-bond formation and characterization with a scanning tunneling microscope." Science 286 pp. 1719-1722, 1999
3. C. Keller "Microfabricated High Aspect Ratio Silicon Flexures", ISBN 0-9666376-0-7, 1998
4. C. Montemagno, G. Bachand, S. Stelick, M. Bachand (1999). "Constructing Nanomechanical Devices Powered by biomolecular Motors." Nanotechnology 10(3) pp. 225-231, 1999
5. J. Kong, H.T. Soh, A. Cassell, C. F. Quate and H. Dai, "Synthesis of Single Single-Walled Carbon Nanotubes on Patterned Silicon Wafers", Nature, 395, pp. 878, 1998
6. M. Madou, "Fundamentals of Microfabrication" CRC Press Boca Raton, Florida, 1997
7. R. Merkle. Nanotechnology 8, No. 1, pp. 18-22. "Convergent Assembly", 1997
8. K.E. Drexler, "Nanosystems: Molecular Machinery, Manufacturing, and Computation", Wiley, 1992
9. H. Jacobson, "On Models of Reproduction" American Scientist 46, pp. 255-284, 1958
10. L. S. Penrose "Self Reproducing Machines", Scientific American 200, pp.105-114, 1959
11. G.D. Skidmore, E. Parker, M. Ellis, N. Sarkar, and R. Merkle, to be presented at the 8th Foresight Conference on Nanotechnology, 2000
12. Y. H. Chen, Y. Wang, and N. C. Tien, "A thick Polysilicon surface micromachined optically sensed accelerometer," Journal of Optoelectronics, 1999
13. MUMPs process available from Cronos Integrated Microsystems, 3021 Cornwallis Road, Research Triangle Park, NC 27709
14. E. J. J. Kruglick and K. S. J. Pister, "Bistable MEMS Relays and Contact Characterization," Proc. Solid State Sensor and Actuator Workshop, Hilton Head, SC, 1998
15. E. Kolesar, private communication.
16. R. Yeh, E. J. J. Kruglick, and K. S. J. Pister, "Surface-micromachined Components for Articulated Microrobots," Journal of Microelectromechanical Systems, V. 5 No. 1, pp 11-17, 1996
17. D. W. Carr and H. G. Craighead, "Fabrication of nanoelectromechanical systems in single crystal silicon using silicon on insulator substrates and electron beam lithography," J. Vac. Sci. Technol. B 15, pp.2760-2765, 1997
18. H. W. P. Koops, J. Kretz, M. Rudolph, M. Weber, G. Dahm, and K. L. Lee, "Characterization and Application of Materials Grown by Electron-Beam-Induced-Deposition," Jpn. J. Appl. Phys., V. 33, pp. 7099-7107, 1994