High precision positioning stage for micro assembly purposes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3680, Issue II, 1999, Pages 734-739

  Weck, Manfred ^a   Petersen, Bernd ^a  

^a Technology   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

GRIPPERS; MICROELECTROMECHANICAL DEVICES; POSITION CONTROL; PRECISION ENGINEERING; ROBOTICS; SCANNING ELECTRON MICROSCOPY;

LARGE-CHAMBER SCANNING ELECTRON MICROSCOPY (LC-SEM); MICRO-ASSEMBLY;

INTEGRATED OPTOELECTRONICS;

EID: 0032624996     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (7)