Equipment technology for flexible and automated micro-assembly

Microsystem Technologies

Volumn 10, Issue 3, 2004, Pages 241-246

  Weck, M ^a   Peschke, C ^a  

^a FRAUNHOFER INSTITUTE FOR PRODUCTION TECHNOLOGY IPT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; COMPUTER VISION; GRIPPERS; MICROMETERS; QUALITY CONTROL; SEMICONDUCTOR DEVICE MANUFACTURE; STRAIN GAGES; VAN DER WAALS FORCES;

ELECTROSTATIC FORCES; MECHANICAL CLAMPING; MICRO-ASSEMBLY; MODULAR ASSEMBLY SYSTEMS;

MICROELECTRONIC PROCESSING;

EID: 1842507089     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-003-0360-5     Document Type: Article

References (5)

1. Koelemeijer Chollet S; Jacot J (1999) Cost efficient assembly of microsystems. MST news 9 (1): 30-32.
2. Gengenbach U; Eberhardt R (2000) Montagelösungen für hybride Mikrosysteme. F & M 108(3): 40-43
3. Van Brussel H et al. (2000) Assembly of microsystems. Annals of the CIRP 49 (2)
4. Böhringer K; Fearing R; Goldberg K (1999) Microassembly. In: Handbook of Industrial Robotics, Nof S. (ed) New York: John Wiley & Sons
5. Proprawe R et al. (2000) Greiferintegration von Komponenten zum Laserstrahlfügen und zur Prozeßüberwachung, In: Arbeits- und Ergebnisbericht des SFB 440: Montage hybrider Mikrosysteme, Aachen