Characterization of flare on Intel's EUV MET

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5751, Issue I, 2005, Pages 293-300

  Lee, Sang Hun ^a   Chandhok, Manish ^a   Roberts, Jeanette ^a   Rice, Bryan J ^a  

^a INTEL CORPORATION   (United States)

Author keywords

EUV; Flare; FVC; MET; MSFR; Point Spread Function; PSD; PSF; Scatter

Indexed keywords

EUV; FLARE; FVC; MET; MSFR; PSD; PSF; SCATTER;

MIRRORS; NATURAL FREQUENCIES; OPTICAL TRANSFER FUNCTION; SURFACE ROUGHNESS;

ULTRAVIOLET RADIATION;

EID: 24644496629     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.600154     Document Type: Conference Paper

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