Effects of flare in extreme ultraviolet lithography: Learning from the engineering test stand

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 6, 2004, Pages 2966-2968

  Chandhok, Manish ^a   Lee, Sang H ^a   Bacuita, Terence ^a  

^a INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRITICAL DIMENSIONS (CD); ENGINEERING TEST STAND (ETS); EXTREME ULTRAVIOLET (EUV); FLARE VARIATION COMPENSATION;

COMPUTER SIMULATION; DEGRADATION; DIFFRACTION; DOSIMETRY; LIGHT SCATTERING; MATHEMATICAL MODELS; MIRRORS; OPTICAL SYSTEMS; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SIMULATORS; SURFACE ROUGHNESS; TRANSFER FUNCTIONS; ULTRAVIOLET RADIATION;

LITHOGRAPHY;

EID: 13244299674     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1824068     Document Type: Conference Paper

References (14)

1. M. Lowisch, U. Dinger, U. Mickan, and T. Heil, Proc. SPIE 5374 (2004).
2. H. Meiling, V. Banine, P. Kürz, and N. Harned, Proc. SPIE 5374 (2004).
3. S. H. Lee, Intel Corp.; D. J. O'Connell, E. M. Gullikson, D. A. Tichenor, and M. Chandhok, Proc. SPIE 5037 (2003).
4. S. H. Lee, M. Chandhok, C. Krautschik, and M. Goldstein, Proc. SPIE 5374 (2004).
5. C. G. Krautschik, M. Chandhok, G. Zhang, and S. H. Lee, Proc. SPIE 5037, 58 (2003).
6. M. Chandhok, S. H. Lee, C. Krautschik, G. Zhang, B. J. Rice, M. Goldstein, E. Panning, R. Bristol, A. Stivers, and M. Shell, Proc. SPIE 5374 (2004).
7. M. Chandhok, S. H. Lee, C. Krautschik, B. J. Rice, E. Panning, M. Goldstein, and M. Shell, Proc. SPIE 5374 (2004).
8. D. J. O'Connell, S. H. Lee, W. P. Ballard, and D. A. Tichenor, Proc. SPIE 5037, 83 (2003).
9. R. L. Brainard, C. Henderson, J. Cobb, and V. Rao, J. Vac. Sci. Technol. B 17, 3384 (1999).
10. J. Bjorkholm (private communication).
11. M. Chandhok, H. Cao, B. J. Rice, R. Bristol, J. Roberts, and D. S. Fryer, 2nd International EUVL Symposium Digest of Abstracts, October 2003.
12. A. R. Pawloski, I. Lalovic, A. Acheta, and H. Levinson, Proc. SPIE 5374 (2004).
13. W. Yueh, H. B. Cao, M. Chandhok, S. Lee, M. Shumway, and J. Bokor, Proc. SPIE 5376 (2004).
14. E. M. Gullikson, S. Baker, J. E. Bjorkholm, J. Bokor, K. A. Goldberg, J. E. M. Goldsmith, C. Montcalm, P. Nalleau, E. Spiller, D. G. Stearns, J. S. Taylor, and J. H. Underwood, Proc. SPIE 3676, 717 (1999).