Measurement technique for surface profiling in low-coherence interferometry

Optics Communications

Volumn 254, Issue 1-3, 2005, Pages 52-57

  Onodera, Ribun ^a   Wakaumi, Hiroki ^a,b   Ishii, Yukihiro ^a,c  

^a Employment Promotion Project Corporation   (Japan)

^b Moritex Corporation Ltd   (Japan)

^c TOKYO UNIVERSITY OF SCIENCE   (Japan)

Author keywords

Coherence; Complex degree of coherence; Interference; Optical interferometry; Profile measurement

Indexed keywords

INTERFEROMETRY; LASER BEAMS; LIGHT INTERFERENCE; PHASE SHIFT;

COMPLEX DEGREE OF COHERENCE; OBJECT BEAMS; OPTICAL INTERFEROMETRY; PROFILE MEASUREMENTS;

COHERENT LIGHT;

EID: 24644435504     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optcom.2005.05.019     Document Type: Article

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