Simultaneous measurement of thicknesses and refractive indices of multiple layers by a low-coherence confocal interference microscope

Optics Letters

Volumn 21, Issue 23, 1996, Pages 1942-1944

  Fukano, Takashi ^a   Yamaguchi, Ichirou ^b  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

^b INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; FUSED SILICA; MICROSCOPES; MIRRORS; MULTILAYERS; OPTICAL GLASS; REFRACTIVE INDEX; SEMICONDUCTOR LASERS; THICKNESS MEASUREMENT;

CONFOCAL INTERFERENCE MICROSCOPE; CONFOCAL PEAKS; LOW COHERENCE INTERFEROMETRY; OPTICAL PATH MATCHING CONDITION;

INTERFEROMETRY;

EID: 0030381669     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.21.001942     Document Type: Article

References (12)

1. P. A. Flournoy, R. W. McClure, and G. Wyntjes, Appl. Opt. 11, 1907 (1972).
2. T. Tsuruta and Y. Ichihara, presented at the International Commission for Optics Conference, Tokyo, August 1974.
3. R. C. Youngquist, S. Carr, and D. E. N. Davies, Opt. Lett. 12, 158 (1987).
4. B. L. Danielson and C. Y. Boisrobert, Appl. Opt. 30, 2975 (1991).
5. D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, Science 254, 1178 (1991).
6. C. K. Hitzenberger, Appl. Opt. 31, 6637 (1992).
7. E. A. Swanson, D. Huang, M. R. Hee, J. G. Fujimoto, C. P. Lin, and C. A. Puliafito, Opt. Lett. 17, 151 (1992).
8. M. J. Yadlowsky, J. M. Schmitt, and R. F. Bonner, Appl. Opt. 34, 5699 (1995).
9. G. J. Tearney, M. E. Brezinski, J. F. Southern, B. E. Bouma, M. R. Hee, and J. G. Fujimoto, Opt. Lett. 20, 2258 (1995).
10. C. J. R. Sheppard, T. J. Connolly, J. Lee, and C. J. Cogswell, Appl. Opt. 33, 631 (1994).
11. T. Fukano and I. Yamaguchi, presented at the 15th Meeting on Lightwave Sensing Technology, Tokyo, June 1995.
12. M. Ohmi, T. Shiraishi, H. Taijiri and M. Haruna, presented at the 11th International Conference on Optical Fiber Sensors, Sapporo, Japan, May 1996.