Dual-wavelength heterodyne differential interferometer for high-precision measurements of reflective aspherical surfaces and step heights

Applied Optics

Volumn 35, Issue 19, 1996, Pages 3525-3533

  Tiziani, H J ^a   Rothe, A ^a   Maier, N ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Aspherical surfaces; Automatic adjustment; Dual wavelength interferometry; Heterodyne interferometry; Stepheight measurements

Indexed keywords

EID: 0001605268     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.35.003525     Document Type: Article

References (19)

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