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Volumn 136-138, Issue , 1998, Pages 587-593
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Blocking- and channeling-ERDA with heavy ions
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Author keywords
Blocking; Channeling; Elastic recoil detection; Ion beam analysis
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Indexed keywords
ANNEALING;
COBALT ALLOYS;
CRYSTAL LATTICES;
GERMANIUM;
ION BOMBARDMENT;
IONIZATION CHAMBERS;
MORPHOLOGY;
RADIATION DAMAGE;
SILICON;
SINGLE CRYSTALS;
HEAVY ION ELASTIC RECOIL DETECTION ANALYSIS (HIERDA);
ION BEAM ANALYSIS;
POSITION SENSITIVE DETECTORS;
ION BEAMS;
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EID: 0032017088
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0168-583X(97)00824-0 Document Type: Article |
Times cited : (21)
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References (15)
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