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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 183, Issue 1-2, 2001, Pages 166-170

Oxidation of Si(0 0 1) observed by high-resolution RBS

(3) Kimura, Kenji a Nakajima, Kaoru b Okazaki, Yasutaka b

a KYOTO UNIVERSITY (Japan)

b NONE

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; OXIDATION; OXYGEN; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

HIGH RESOLUTION RUTHERFORD BACKSCATTERING SPECTROSCOPY (HRBS);

SILICON;

EID: 0035398787 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(01)00327-5 Document Type: Article

Times cited : (4)

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