Kinetic Monte Carlo simulations of CVD diamond growth-Interlay among growth, etching, and migration

Diamond and Related Materials

Volumn 14, Issue 10, 2005, Pages 1630-1646

  Netto, Armando ^a   Frenklach, Michael ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Diamond film growth; Kinetic modelling; Reaction mechanism

Indexed keywords

ADSORPTION; CHEMICAL VAPOR DEPOSITION; DIAMONDS; DIFFUSION; KINETIC THEORY; LATTICE CONSTANTS; MONTE CARLO METHODS; PROBABILITY DISTRIBUTIONS;

DIAMOND FILM GROWTH; KINETIC MODELING; REACTION MECHANISM; SURFACE MIGRATION;

CRYSTAL GROWTH;

EID: 24144493851     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.05.009     Document Type: Article

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