High growth rate MWPECVD of single crystal diamond

Diamond and Related Materials

Volumn 13, Issue 4-8, 2004, Pages 557-560

  Williams, Oliver A ^a   Jackman, Richard B ^a  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

Author keywords

Growth rate; Homoepitaxial growth; Single crystal diamond

Indexed keywords

CONTAMINATION; CRYSTAL GROWTH; ELECTRONIC PROPERTIES; EPITAXIAL GROWTH; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SINGLE CRYSTALS;

GROWTH RATES; HOMOEPITAXIAL FILMS; SURFACE CONDUCTIVITY;

DIAMONDS;

DIAMOND;

EID: 2442532919     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.01.023     Document Type: Article

References (13)

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