Patterned growth of heteroepitaxial diamond

Diamond and Related Materials

Volumn 13, Issue 11-12, 2004, Pages 1975-1979

  Ando, Y ^a   Kuwabara, J ^a   Suzuki, K ^b   Sawabe, A ^a  

^a AOYAMA GAKUIN UNIVERSITY   (Japan)

^b Toplas Engineering Co Ltd   (Japan)

Author keywords

Bias growth; Electronic device structures; Heteroepitaxy; Nucleation

Indexed keywords

ARGON; CHEMICAL VAPOR DEPOSITION; ELECTRON BEAM LITHOGRAPHY; EPITAXIAL GROWTH; ETCHING; MAGNESIA; MASKS; SINGLE CRYSTALS; SPUTTERING; SURFACE PHENOMENA;

BIAS GROWTH; ELECTRONIC DEVICE STRUCTURES; HETEROEPITAXY; MICROFABRICATION;

DIAMONDS;

EID: 7544244950     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.06.025     Document Type: Conference Paper

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