Estimating thermal transport in deep X-ray lithography with an inversion method

Applied Physics B: Lasers and Optics

Volumn 81, Issue 4, 2005, Pages 543-548

  Chang, W J ^a   Yang, Y C ^a   Lin, C M ^b  

^a KUN SHAN UNIVERSITY   (Taiwan)

^b WUFENG INSTITUTE OF TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ERRORS; INVERSE PROBLEMS; MACHINE COMPONENTS; POLYMERS; SCANNING; SUBSTRATES; THERMAL EFFECTS; THERMODYNAMICS; X RAY LITHOGRAPHY;

HEAT SOURCES; INVERSION METHOD; LITHOGRAPHY SYSTEMS; THERMAL TRANSPORT SYSTEMS;

HEAT TRANSFER;

EID: 24144475497     PISSN: 09462171     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00340-005-1909-z     Document Type: Article

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