A micro corona motor

Sensors and Actuators, A: Physical

Volumn 118, Issue 2, 2005, Pages 226-232

  Lee, Sanghoon ^a   Kim, Daejong ^b   Bryant, Michael D ^b   Ling, Frederick F ^c  

^a SAMSUNG Electronics   (South Korea)

^b The University of Texas at Austin   (United States)

^c NONE   (United States)

Author keywords

Built on X ray mask; Corona; LIGA; Micro motor; Microfabrication

Indexed keywords

ELECTRIC POTENTIAL; ELECTRODES; IONIZATION; MASKS; PHOTORESISTS; ROTORS; TORQUE; X RAY LITHOGRAPHY;

BUILT-ON X-RAY MASK; LIGA; MICRO MOTOR; MICROFABRICATION;

ELECTRIC MOTORS;

CORONA; ELECTRIC MOTORS; ELECTRIC POTENTIAL; ELECTRODES; LITHOGRAPHY; ROTORS; TORQUE; X RAY ANALYSIS;

EID: 13244283239     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.08.017     Document Type: Article

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