Physical modeling and analysis of microlens formation fabricated by a modified LIGA process

Journal of Micromechanics and Microengineering

Volumn 13, Issue 5, 2003, Pages 523-531

  Kim, Dong Sung ^a   Yang, Sang Sik ^a   Lee, Sung Keun ^a   Kwon, Tai Hun ^a   Lee, Seung S ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COOLING; GLASS TRANSITION; HEAT TREATMENT; MATHEMATICAL MODELS; MICROOPTICS; MOLECULAR WEIGHT; PHOTOLITHOGRAPHY; PLASTIC SHEETS; POLYMETHYL METHACRYLATES; SURFACE TENSION; TEMPERATURE; X RAYS;

DEEP X-RAY LITHOGRAPHY; MICROLENS; POLYMETHYL METHACRYLATE SHEET; THERMODYNAMIC NON-EQUILIBRIUM COOLING;

LENSES;

EID: 0141718839     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/5/302     Document Type: Article

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