Experimental study on integration of laser-based additive/subtractive processes for meso/micro solid freeform fabrication

International Journal of Advanced Manufacturing Technology

Volumn 26, Issue 4, 2005, Pages 335-341

  Choi, Hongseok ^a   Yang, Yong ^a   Li, Xiaochun ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

Integration; Laser microdeposition; Laser micromachining; Micropowder; Solid freeform fabrication; Ultrasonic based feeding system

Indexed keywords

ADDITIVES; CHARACTERIZATION; FEEDING; INTEGRATION; LASER BEAMS; MICROMACHINING; STAINLESS STEEL; SUBSTRATES;

LASER MICRODEPOSITION; LASER MICROMACHINING; MICROPOWDER; ULTRASONIC-BASED FEEDING SYSTEMS;

LAYERED MANUFACTURING;

EID: 23944485443     PISSN: 02683768     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00170-003-2008-0     Document Type: Article

References (31)

1. Jiang XN, Sun C, Zhang X, Xu B, Ye YH (2000) Micro-stereolithography of lead zirconate titanate thick film on Silicon Substrate. Sens Actuators A 87(1-2):72-77
2. Zhang X, Jiang XN, Sun C (1999) Micro-stereolithography for polymeric and ceramic microstructures. Sens Actuators A 77(2): 149-156
3. Varadan VK, Varadan W, Motojima S (1996) Three-dimensional polymeric and ceramic MEMS and their applications. Proceedings of SPIE. Smart Structures and Materials 1996: Smart Electronics and MEMS. vol 2722, pp 156-164
4. Varadan VK, Varadan VV (2000) Micropump and venous valve by micro stereo lithography. Proceedings of SPIE. Smart Structures and Materials 2000: Smart Electronics and MEMS, vol 3990, pp 246-254
5. Maruo S, Ikuta K (1999) Movable microstructures made by two-photon three-dimensional microfabrication. Proceedings of the International Symposium on Micro Machine and Human Science, Piscataway, NJ, pp 173-178
6. Maruo S, Ikuta K (2000) Three-dimensional microfabrication by use of single-photon-absorbed polymerization. Appl Phys Lett 76(19):2656-2658
7. Cohen A, Zhang G, Tseng F, Mansfeld F, Frodis U, Will P (1998) EFAB: Batch production of functional, fully-dense metal parts with micron-scale features. Solid Freeform Fabrication Proceedings, Austin, TX, pp 161-168
8. Weiss LE, Merz R, Prinz FB, et al. (1997) Shape deposition manufacturing of heterogeneous structures. J Manuf Syst 16(4):239-248
9. Li XC, Golnas A, Prinz F (2000) Shape deposition manufacturing of smart metallic structures with embedded sensors. Proceedings of SPIE: Smart Structures and Materials 2000: Sensory Phenomena and Measurement Instrumentation for Smart Structures and Materials, vol 3986, pp 160-171
10. Chrisey DB, Gamota DR, Helvajian H, Taylor CP (2000) Materials development for direct write technologies. Materials Research Society Symposium Proceedings 624:3-8
11. Mazumder J, Kar A (1995) Theory and application of laser chemical vapor deposition. Plenum, New York, pp 215-293
12. Jean D, Duty C, Fuhrman B, Lackey WJ (1999) Precision LCVD system design with real time process control. Solid Freeform Fabrication Proceedings, Austin, TX, pp 59-65
13. Renn MJ, Vdovin O, Weiman CE, Anderson DZ, Cornell EA (1995) Laser-guided atoms in hollow-core optical fibers. Phys Rev Lett 75:3253-3256
14. Pique A, Chrisey DB, Fitz-Gerald JM, et al. (2000) Direct writing of electronic and sensor materials using a laser transfer technique. J Mater Res 15(9):1872-1875
15. Griffith ML, Keicher DM, Atwood CL, et al. (1996) Free form fabrication of metallic components using laser engineered net shaping (LENS). Solid Freeform Fabrication Proceedings, Austin, TX, pp 125-132
16. Lewis GK, Nemec R, Milewski J, Thoma DJ, Cremers D, Barbe M (1994) Directed light fabrication. Proceedings of SPIE: ICALEO '94: Laser Materials Processing, vol 2500, pp 17-26
17. Mazumder J, Schifferer A, Choi J (1999) Direct materials deposition: designed macro and microstructure. Mater Res Innov 3(3):118-131
18. Miller JC (1994) Laser ablation. Springer, Berlin Heidelberg New York
19. Swenson E, Sun Y, Dunsky C (2000) Laser micromachining in the microelectronics industry: a historical overview. Proceedings of SPIE: Laser Beam Shaping, vol 4095, pp 118-132
20. Gower MC (1993) Excimer lasers: current and future applications in industry and medicine. Crafer RC, Oakley PJ (eds) Laser processing in manufacturing. Chapman & Hall, London
21. Ramos J, Estrela R, Pitarch L, Julia J, Pascual B (1999) Laser micromachining of metals. Proceedings of SPIE: Computer-Controlled Microshaping, vol 3822, pp 207-213
22. Li J, Ananthasuresh G (2001) Quality study on the excimer laser micro-machining of electro-thermal-compliant micro devices. J Micromechan Microeng 11(1):38-47
23. Hartke K, King K, Farson D, Ely K (2000) Micromachining with a frequency converted diode-pumped Nd:YAG laser. Proceedings of SPIE: Laser Precision Microfabrication, vol 4088, pp 248-251
24. Stamm U, Fiebig M, Govorkov S, et al. (2000) Novel results of laser precision microfabrication with excimer lasers and solid-state lasers. Proceedings of SPIE: Laser Precision Microfabrication, SPIE, 4088, pp 118-123
25. Toenshoff H, Von AF, Ostendorf A, Willmann G, Wagner T (1999) Precision machining using UV and ultrashort pulse lasers. Proceedings of SPIE: Design, Test, and Microfabrication of MEMS and MOEMS, vol 3680, pp 536-545
26. Illy EK, Withford MJ, Brown D, Piper JA (1997) High-speed microdrilling of polymers using high PRF UV lasers. Proceedings of SPIE. CLEO '97: Summaries of papers presented at the Conference on Lasers and Electro-Optics, Optical Society of America, vol 11, pp 359
27. Ready JF (2001) LIA Handbook of Laser Materials Processing. Magnolia Publishing, Inc., Orlando, Florida, USA, Chap. 1
28. Lehane C, Kwok HS (2001) Enhanced drilling using a dual-pulse Nd:YAG laser. Appl Phys A 73:45-48
29. Ready JF (2001) LIA Handbook of Laser Materials Processing. Magnolia Publishing, Inc., Orlando, Florida, USA, Chap. 5
30. Govorkov SV, Slobodtchikov EV, Wiessner AO, Basting D (2000) High accuracy microdrilling of steel with solid-state UV laser at 10 mm/sec rate. Proceedings of SPIE: Laser Applications in Microelectronic and Optoelectronic Manufacturing V, vol 3933, pp 365-370
31. Chang JJ, Warner BE (1996) Laser-plasma interaction during visible-laser ablation of metals. Appl Phys Lett 69(4):473-475