Laser micromachining in the microelectronics industry: A historical overview

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4095, Issue , 2000, Pages 118-132

  Swenson, Edward J ^a   Sun, Yunlong ^a   Dunsky, Corey ^a  

^a Electro Scientific Industries Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LASER MEMORY REPAIR; LASER MICROMACHINING; MICROVIA DRILLING;

DYNAMIC RANDOM ACCESS STORAGE; HYBRID INTEGRATED CIRCUITS; LASER ABLATION; MICROELECTRONICS; MICROMACHINING; NEODYMIUM LASERS; PRINTED CIRCUIT MANUFACTURE; PROCESS ENGINEERING;

LASER APPLICATIONS;

EID: 0034538595     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.405254     Document Type: Conference Paper

References (19)