Three-dimensional polymeric and ceramic MEMS and their applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2722, Issue , 1996, Pages 156-164

  Varadan, Vijay K ^a   Varadan, Vasundara V ^a   Motojima, S ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICRO COIL SPRINGS; MICROELECTROMECHANICAL SYSTEMS (MEMS);

AIRCRAFT; CERAMIC MATERIALS; CONTROL SYSTEMS; DRAG; ELECTROMECHANICAL DEVICES; FABRICATION; FOCUSING; LITHOGRAPHY; POLYMERS; ULTRAVIOLET RADIATION;

INTELLIGENT STRUCTURES;

EID: 0029773062     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)