Novel results of laser precision microfabrication with excimer lasers and solid-state lasers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4088, Issue , 2000, Pages 118-123

  Stamm, Uwe ^a   Fiebig, Michael ^a   Govorkov, Sergei ^a   Mayer, Eric ^a   Osmanov, Rustem ^a   Scaggs, Michael ^a   Slobodchikov, Evgeni ^a   Wiessner, Alexander ^a   Basting, Dirk ^a  

^a Lambda Physik GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DRILLING; EXCIMER LASERS; MICROMACHINING; NEODYMIUM LASERS; ULTRAVIOLET RADIATION;

LASER PRECISION MICROFABRICATION; MICRODRILLING;

PULSED LASER APPLICATIONS;

EID: 0034516395     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.405697     Document Type: Article

References (0)