Precision machining using UV and ultrashort pulse lasers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3680, Issue I, 1999, Pages 536-545

  Toenshoff, H K ^a   von Alvensleben, F ^a   Ostendorf, A ^a   Willmann, G ^a   Wagner, T ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; DRILLING; EXCIMER LASERS; GLASS; LASER BEAM CUTTING; MASKS; METALLIZING; MICROMACHINING; NEODYMIUM LASERS; POLYMERS; PULSED LASER APPLICATIONS; SEMICONDUCTING SILICON;

PRECISION LASER MICROMACHINING; ULTRAVIOLET LASERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032663810     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.341243     Document Type: Conference Paper

References (24)