A passive micro gas regulator for hydrogen flow control

Journal of Micromechanics and Microengineering

Volumn 15, Issue 9, 2005, Pages

  Debray, A ^a   Nakakubo, T ^a   Ueda, K ^a   Mogi, S ^a   Shibata, M ^a   Fujita, H ^b  

^a CANON INC   (Japan)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; COMPUTER SIMULATION; HYDROGELS; HYDROGEN; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES;

DIMENSIONS; GAS PRESSURE; HIGH-PRESSURE TANKS; MICRO GAS REGULATORS;

FLOW OF FLUIDS;

EID: 23944443858     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/9/S05     Document Type: Article

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