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Volumn 11, Issue 2, 2001, Pages 108-112
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Analysis and testing of a fluidic vortex microdiode
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER SIMULATION;
DIODES;
FLUIDIC DEVICES;
OPTIMIZATION;
REACTIVE ION ETCHING;
SILICON WAFERS;
VISCOSITY;
VORTEX FLOW;
FLUIDIC VORTEX MICRODIODES;
MICROELECTROMECHANICAL DEVICES;
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EID: 0035280942
PISSN: 09601317
EISSN: None
Source Type: Journal
DOI: 10.1088/0960-1317/11/2/304 Document Type: Article |
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Times cited : (27)
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References (9)
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