Probe card with probe pins grown by the Vapor-Liquid-Solid (VLS) method

IEEE Transactions on Components Packaging and Manufacturing Technology Part A

Volumn 19, Issue 2, 1996, Pages 258-267

  Asai, Shin'ichiro ^a   Kato, Kazuo ^a   Nakazaki, Noriaki ^a   Nakajima, Yukihiko ^a  

^a DENKA COMPANY LIMITED   (Japan)

Author keywords

Probe card; Probe pin; Silicon; Silicon on insulator; Vapor liquid solid crystal growth; Wafer level burn in; Whisker

Indexed keywords

CRYSTAL GROWTH; CRYSTAL WHISKERS; ELECTRIC LINES; ELECTRIC WIRING; ENCAPSULATION; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; THERMAL EXPANSION;

HIGH SPEED CIRCUIT; MESA METHOD; PROBE CARD; PROBE PIN; VAPOR LIQUID SOLID CRYSTAL GROWTH; WAFER LEVEL BURN IN;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0030173251     PISSN: 10709886     EISSN: None     Source Type: Journal    
DOI: 10.1109/95.506112     Document Type: Article

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