Fabrication of Oxidized Porous Silicon (OPS) air-bridge for RF application using micromachining technology

Journal of the Korean Physical Society

Volumn 39, Issue SUPPL. Part 1, 2001, Pages

  Kim, Y M ^a   Noh, K Y ^a   Park, J Y ^a   Lee, J H ^a   Kim, Y D ^b   Yu, I S ^c   Cho, C S ^a  

^a Kyungpook National University   (South Korea)

^b Lumsonic Co Ltd   (South Korea)

^c Kyungdong Coll of Techno Info   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035542161     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)

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7. M. Ozgur, V. Milanovic, C. Zincke and Mona E. Zaghloul., IEEE (199).8