Characterization of an oxidized porous silicon layer by complex process using RTO and the fabrication of CPW-type stubs on an OPSL for RF application

ETRI Journal

Volumn 26, Issue 4, 2004, Pages 315-320

  Park, Jeong Yong ^a   Lee, Jong Hyun ^b  

^a Daejeon Hightech Indust Prom F   (South Korea)

^b Kyungpook National University   (South Korea)

Author keywords

Porous silicon; RTO; Stub

Indexed keywords

ANTENNAS; DIPLEX TRANSMISSION; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; GALLIUM COMPOUNDS; LAYERED MANUFACTURING; OHMIC CONTACTS; SUBSTRATES; THERMOOXIDATION; X RAY PHOTOELECTRON SPECTROSCOPY;

GAAS; OXIDIZED POROUS SILICON LAYER (OPSL); RTO; STUB;

POROUS SILICON;

EID: 4043181922     PISSN: 12256463     EISSN: None     Source Type: Journal    
DOI: 10.4218/etrij.04.0103.0124     Document Type: Article

References (12)

1. J. Bruechler, E. Kasper, P. Russer, and KM. Strohm, "Silicon High-Resistivity-Substrate Millimeter-Wave Technology," IEEE Trans. Microwave Theory Tech., vol. MTT-34, Dec. 1986, pp.1516-1521.
2. H.S. Kim, H.J. Kim, S.E. Hong, D.Y. Jung, and E.S. Nam, "Fabrication and Characteristics of an InP Single HBT and Waveguide PD on Double Stacked Layers for an OEMMIC," ETRI J., vol. 26 no. 1, Feb. 2004, pp. 61-64.
3. K.J. Herrick, Thomas A. Schware, and Linda P.B., "Si-Micromachined Coplanar Waveguides for Use in High-Frequency Circuits," IEEE Thin. Microwave Theory Tech., vol. 46, June 1998, pp. 762-767.
4. A. Dehe, H. Klingbeil, C. Weil, and H.L. Hartnagel., "Membrane- Supported Coplanar Waveguides for MMIC and Sensor Application," IEEE Microwave and Guided Wave Letters, vol. 8, no. 5, May 1998, pp. 185-187.
5. T. Unagami, "Oxidation of Porous Silicon and Properties of Its Oxide Film," Jpn. J. Appl. Phys. vol. 19, 1980, pp. 231-241.
6. R.L. Peterson and R.F. Drayton, "Dielectric Properties of Oxidized Porous Silicon in a Low Resistivity Substrate," IEEE MTT-S Dig., 2001, pp. 765-768.
7. H.S. Kim, Y.H. Xie, M. DeVincentis, T. Itoh, and K.A. Jenkins, "A Study of Unoxidized Porous Si as an Isolation Material for Mixed-Signal Integrated Circuit Applications," J. Appl. Phys., vol. 93, 2003, pp.4226-4230.
8. J.Y Park, J.H. Lee, J.H. Sim, C.S. Cho, and Y.H. Bae, "Fabrication of a Transmission Line on a Thick Silicon Dioxide Air-Bridge Using a Complex Oxidation Process and MEMS Technology," JKPS, vol. 41, July 2002, pp. 160-163.
9. J.Y Park and J.H. Lee, "Characterization of 10 μm Thick Porous Silicon Dioxide Obtained by Complex Oxidation Process for RF Application," Materials Chemistry and Physics, vol. 82, Aug. 2003, pp. 134-139.
10. S. Iordanescu, G. Bartolucci, S. Simion, and M. Dragoman, "Coplanar Waveguide Stub/Filters on Thin Membranes and Standard Substrates," IEEE MTT-S Dig., 1997, pp. 357-360.
11. K. Hettak, N. Dib, A. Omar, G.Y. Delisle, M.G. Stubbs, and S. Toutain, "A Useful New Class of Miniature CPW Shunt Stubs and Its Impact on Millimeter-Wave Integrated Circuits," IEEE Trans. On MTT, vol. 47, Dec. 1999, pp.2340-2349.
12. K. Hettak, T. Laneve, and M.G. Stubbs, "Size-Reduction Techniques for CPW and ACPS Structures," IEEE Microwave Theory Tech., vol. 49, no. 11, Nov. 2001, pp. 2112-2116.