A novel MEMS silicon probe card

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 368-371

  Kim, Bong Hwan ^a,b   Park, Sangjun ^a,b   Lee, Byeungleul ^a   Lee, Jong Ho ^a,c   Min, Bong Gi ^d   Choi, Soon Don ^d   Cho, Dong il Dan ^a,b   Chun, Kukjin ^a,b  

^a Seoul National University   (South Korea)

^b Seoul National University   (South Korea)

^c Wonkwang University   (South Korea)

^d Yeungnam University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; BUILT-IN SELF TEST; ELECTRIC RESISTANCE MEASUREMENT; ELECTROPLATING; PROBES; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS; SUBSTRATES;

MICROELECTROMECHANICAL PROBE CARD; SILICON PROBE CARD; SILICON SUBSTRATE; WAFER LEVEL BURN-IN TESTING;

MICROELECTROMECHANICAL DEVICES;

EID: 0036122202     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2002.984279     Document Type: Article

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