MULTI-LEVEL POLYSILICON SURFACE-MICROMACHINING TECHNOLOGY: APPLICATIONS AND ISSUES

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 1996-H, Issue , 1996, Pages 751-759

  Sniegowski, Jeffry J ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MEMS; POLYCRYSTALLINE MATERIALS; POLYSILICON; SURFACE MICROMACHINING; TOPOGRAPHY;

MANUFACTURING METHODS; MANUFACTURING TOOLS; MEMS (MICROELECTROMECHANICAL SYSTEM); MULTILEVELS; POLYSILICON SURFACE-MICROMACHINING; SURFACE MICROMACHINING TECHNOLOGY; TECHNOLOGY APPLICATION; TECHNOLOGY ISSUES; THREE-LEVEL; TOOLSETS;

CHEMICAL MECHANICAL POLISHING;

EID: 26444601439     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE1996-0691     Document Type: Conference Paper

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