Near-surface generation of negative ions in low-pressure discharges

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 5, 2001, Pages 2109-2115

  Stoffels, E ^a   Stoffels, W W ^a   Kroutilina, V M ^b   Wagner, H E ^b   Meichsner, J ^b  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b UNIVERSITY OF GREIFSWALD   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

GLOW DISCHARGES; GROUNDING ELECTRODES; MASS SPECTROMETRY; PLASMA THEORY;

LOW-PRESSURE DISCHARGES;

NEGATIVE IONS;

EID: 0035441778     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1374617     Document Type: Article

References (8)