Experimental surface acoustic wave properties of AlN thin films on sapphire substrates

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 1 A, 1997, Pages 307-312

  Kaya, Kiyoshi ^a   Takahashi, Hiroshi ^a   Shibata, Yoshihiko ^a   Kanno, Yasuhito ^a   Hirai, Toshio ^b  

^a ASAHI CHEMICAL INDUSTRY CO   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Acoustic impedance; AlN; Chemical vapor deposition; Electro mechanical coupling constant; Normalized susceptance; Piezoelectricity; Static capacitance; Surface acoustic wave properties

Indexed keywords

ALUMINUM NITRIDE FILMS; ELECTROMECHANICAL COUPLING CONSTANT;

ACOUSTIC IMPEDANCE; ACOUSTIC SURFACE WAVE DEVICES; AUGER ELECTRON SPECTROSCOPY; CAPACITANCE; CHEMICAL VAPOR DEPOSITION; MAGNETRON SPUTTERING; PIEZOELECTRICITY; SAPPHIRE; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; THIN FILMS; X RAY CRYSTALLOGRAPHY;

SEMICONDUCTING ALUMINUM COMPOUNDS;

EID: 0030696545     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.36.307     Document Type: Article

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