Mechanical fastener designs for use in the microassembly of 3D microstructures

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn , Issue , 2004, Pages 447-456

  Dechev, Nikolai ^a   Mills, James K ^a   Cleghorn, William L ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ASSEMBLY MACHINES; IMAGE SEGMENTATION; MICROMACHINING; MICROSTRUCTURE; PRODUCT DESIGN; ROBOTICS; SCANNING ELECTRON MICROSCOPY; SURFACE PROPERTIES;

3D MICROSTRUCTURES; MECHANICAL FASTENERS; MICRO-TRANSFORMER; MICROASSEMBLY;

FASTENERS;

EID: 21644435252     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2004-62212     Document Type: Conference Paper

References (16)

1. D. Koester, A. Cowen, R. Mahadevan, and B. Hardy, "PolyMUMPs Design Handbook Revision 8.0", MEMSCAP, MEMS Business Unit (CRONOS), Research Triangle Park, N.C., USA, 2001.
2. N. Dechev, W. L. Cleghorn, and James K. Mills, "Microassembly of 3D Microstructures Using a Compliant, Passive Microgripper", Journal of Microelectromechanical Systems, vol. 13, no. 2, Apr. 2004, pp. 176-189.
3. G A. Singh, D. Horsely, M. Cohn, A. Pisano, and R. Howe, "Batch Transfer of Microstructures Using Flip-Chip Solder Bonding", Journal of Microelectromechanical Systems, vol. 8, no. 1,Mar. 1999, pp. 27-33.
4. M. M. Maharbiz, R.T. Howe, and K. S. J. Pister, "Batch Transfer Assembly of Micro-Components Onto Surface and SOI MEMS," Transducers '99 Conference, Sendai, Japan, June 7-10, 1999.
5. T. Ebefors, J. Ulfstedt-Mattsson, E. Kälvesten, and G. Stemme, "3D micromachined devices based on Polyimide Joint technology", presented at SPIE Symposium on Microelectronics and MEMS, Gold Coast, Queensland, Australia, SPIE vol. 3892, Oct. 1999, pp. 118-132.
6. K. F. Harsh, V. M. Bright, and Y. C. Lee, "Solder Self-Assembly for Three-Dimensional Microelectromechanical Systems", Sensors and Actuators A, vol. 77, 1999, pp. 237-244.
7. J. Zou, J. Chen, C. Liu, and J. E. Schutt-Ainé, "Plastic Deformation Magnetic Assembly (PDMA) of Out-of-Plane Microstructures: Technology and Application", Journal of Microelectromechanical Systems, vol. 10, no. 2, June 2001, pp. 302-309.
8. G. Yang, J.A. Gaines, and B.J. Nelson, "A flexible experimental workcell for efficient and reliable wafer-level 3D microassembly," froc. IEEE International Conference on Robotics and Automation (ICRA 2001), Seoul, South Korea, 2001, pp. 133-138.
9. Y. S. Oh, W. H. Lee, H. E. Stephanou, and G. D. Skidmore, "Design, Optimization and Experiments of Compliant Microgripper", Proc. ASME International Mechanical Engineering Congress and R&D Expo (IMECE2003), Washington, D.C., Nov. 15-21, 2003.
10. E. Shimada, J. A. Thompson, J. Yan, R. Wood, and R. S. Fearing, "Prototyping MilliRobots Using Dextrous Microassembly and Folding", Proc. ASME International Mechanical Engineering Congress and Expo (IMECE / DSCD), Orlando, Florida, Nov. 5-10, 2000.
11. R. Prasad, K.-F. Böhringer, and N. C. MacDonald, "Design, Fabrication, and Characterization of SCS Latching Snap Fasteners for Micro Assembly," Proceedings of ASME International Mechanical Engineering Congress and Exposition(IMECE), San Francisco, California, Nov. 1995.
12. L. Zhou, J. M. Kahn, and K. S. J. Pister, "Corner-Cube Retroreflectors Based on Structure-Assisted Assembly for Free-Space Optical Communication", J. of Microelectromechanical Systems, vol. 12, no. 3, June 2003, pp. 233-242.
13. M. Cohn, K.F. Böhringer, J. M. Noworolski, A. Singh, C.G Keller, K.Y. Goldberg, and R.T. Howe, "Microassembly Technologies for MEMS", SPIE Micromachining and Microfabrication, Invited Paper Plenary Session, Santa Clara, CA, Sept. 1998.
14. N. Dechev, W. L. Cleghom, and J. K. Mills, "Tether and Joint Design for Micro-Components used in Microassembly of 3D Microstructures," Proc. of SPIE Micromachining and Micro-fabrication, Photonics West, San Jose, CA, Jan. 25-29, 2004.
15. N. Dechev, W. L. Cleghorn, and J. K. Mills, "Construction of a 3D MEMS Microcoil Using Sequential Robotic Microassembly Operations," Proceedings ASME International Mechanical Engineering Congress and R&D Expo 2003, Washington, D.C, Nov. 15-21, 2003.
16. N. Dechev, "Microassembly Movie Files", [online], [cited Aug. 30, 2004], Available from World Wide Web: 〈http://www.mie.utoronto.ca/staff/projects/cleghorn/Microassembly/ ASME04movies.html7rang;.