Tether and joint design for micro-components used in microassembly of 3D microstructures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5344, Issue , 2004, Pages 134-146

  Dechev, Nikolai ^a   Cleghorn, William L ^a   Mills, James K ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

3D; Assembly; Joint; MEMS; Micro; Microassembly; Micromachined; Microstructure; Tether

Indexed keywords

ELASTIC DEFLECTION; MICROASSEMBLY; MICROGRIPPERS; TETHER DESIGN;

ASSEMBLY; ELASTICITY; MICROELECTRONIC PROCESSING; MICROMACHINING; MICROSTRUCTURE; POLYSILICON;

MICROELECTROMECHANICAL DEVICES;

EID: 2142823920     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.524685     Document Type: Conference Paper

References (12)

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