Construction of a 3D MEMS microcoil using sequential robotic microassembly operations

American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)

Volumn 5, Issue , 2003, Pages 125-131

  Dechev, Nikolai ^a   Cleghorn, William L ^a   Mills, James K ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER WORKSTATIONS; ELECTRIC INDUCTORS; MICROMACHINING; MICROPROCESSOR CHIPS; MICROSTRUCTURE; ROBOTIC ASSEMBLY; SCANNING ELECTRON MICROSCOPY;

MICROASSEMBLY OPERATIONS; MICROCOILS;

MICROELECTROMECHANICAL DEVICES;

EID: 1942424169     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/imece2003-42798     Document Type: Conference Paper

References (12)

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