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Volumn , Issue , 2004, Pages 239-242
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Integration of high-performance SiGe:C HBTs with thin-film SOI CMOS
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Author keywords
[No Author keywords available]
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Indexed keywords
BANDWIDTH;
ELECTRIC POTENTIAL;
HETEROJUNCTION BIPOLAR TRANSISTORS;
ION IMPLANTATION;
SILICON WAFERS;
THICKNESS MEASUREMENT;
THIN FILMS;
CMOS INTEGRATED CIRCUITS;
SI-GE ALLOYS;
FREQUENCY RANGE;
HALO IMPLANTS;
HIGH BANDWIDTH COMMUNICATION SYSTEM;
WET ETCHING;
CMOS INTEGRATED CIRCUITS;
THIN FILMS;
B-Y IONS;
IONS IMPLANTATION;
LOW RESISTANCE;
PERFORMANCE;
SIGE HBTS;
SIGE:C-HBT;
SILICON ISLANDS;
SOI CMOS;
THIN BODY;
THIN FILM SOI;
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EID: 21644432295
PISSN: 01631918
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (14)
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References (8)
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