Nano-scale fatigue wear of carbon nitride coatings: Part I - Wear properties

Journal of Tribology

Volumn 125, Issue 2, 2003, Pages 430-436

  Wang, Dong F ^a   Kato, Koji ^b  

^a Faculty of Engineering   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NITRIDE; DIAMONDS; FATIGUE OF MATERIALS; FRICTION; LOADS (FORCES);

CARBON NITRIDE COATINGS;

COATINGS;

CARBON NITRIDE; COATING; FATIGUE; TRIBOLOGY; WEAR MEASUREMENT;

EID: 0038443054     PISSN: 07424787     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1537266     Document Type: Article

References (31)

1. Holmberg, K., and Matthews, A., 1994, Coatings Tribology, Dowson, D., eds., Tribology Series, 28, Elsevier, pp. 125-235.
2. Erdemir, A., Switala, M., Wie, R., and Wilbur, P., 1991, Surface and Coatings Technology, 50, pp. 17.
3. Grill, A., 1997, "Tribology of Diamondlike Carbon and Related Materials: An Updated Review," Surf. Coat. Technol., 94/95, pp. 507-513.
4. Donnet, C., Mogne, T. Le, Ponsonnet, L., Belin, M., Grill, A., Patel, V., and Jahnes, C., 1998, "The Respective Role of Oxygen and Water Vapor on the Tribology of Hydrogenated Diamond-like Carbon Coatings," Tribol. Lett., 4, pp. 259-265.
5. Liu, A. Y., and Cohen, M. L., 1989, "Prediction of New Low Compressibility Solid," Science, 245, pp. 841-842.
6. 4," Phys. Rev. A. 15, pp. 10727-10734.
7. Chen, M. Y., Lin, X., Dravid, V. P., Chung, Y. W., Wong, M. S., and Sproul, W. D., 1993, "Synthesis and Tribological Properties of Carbon Nitride as a Novel Superhard Coating and Solid Lubricant," Tribol. Trans., 36, pp. 491-495.
8. Li, D., Cutiongco, E., Chung, Y.-W., Wong, M. S., and Sproul, W. D., 1994, "Composition, Structure and Tribological Properties of Amorphous Carbon Nitride Coatings," Surf. Coat. Technol., 68-69, pp. 611-615.
9. Sjostrom, H., Ivanov, I., Johansson, M., Hultman, L., Sundgren, J.-E., Hainsworth, S. V., Page, T. F., and Wallenberg, L. R., 1994, "Reactive Magnetron Sputter Deposition of CNx Films on Si(001) Substrates: Film Growth. Microstructure and Mechanical Properties," Thin Solid Films, 246, pp. 103-109.
10. Wang, X., Martin, P. J., and Kinder, T. J., 1995, "Optical and Mechanical Properties of Carbon Nitride Films Prepared by Ion-Assisted Arc Deposition and Magnetron Sputtering," Thin Solid Films, 256, pp. 148-154.
11. Kola, P. V., Cameron, D. C., Hashmi, M. S. J., Meenan, B. J., Pischow, K. A., Anderson, C. A., and Brown, N. M. D., 1995, "Magnetron-Sputtered Carbon Nitride (CNx) films," Surf. Coat. Technol., 74-75, pp. 696-703.
12. Hrdina, J., Jastrabik, L., Fendrich, F., and Sobota, J., 1995, 6th Int. Summer School 'Modern Plasma Technology', Mielno'95, 30 May-1 June.
13. Novikov, N., Voronkin, M. A., Smekhnor, A. A., Zaika, N. I., and Zakharchuk, A. P., 1995, "Deposition by Reactive Ion-Plasma Sputtering and Characterization of C-N thin Films," Diamond Relat. Mater., 4, pp. 390-393.
14. 4 Thin Films," J. Vac. Sci. Technol. A, A13, pp. 2914-2919.
15. Ogata, K., Chubaci, J. F. D., and Fujimoto, F., 1994, "Properties of Carbon Nitride Films with Composition Ratio C/N=0.5-3.0 Prepared by the Ion and Vapor Deposition Method," J. Appl. Phys., 76, pp. 3791-3796.
16. Suzuki, S., Matsuura, T., Uchizawa, M., Yura, S., and Shibata, H., 1991, "Friction and Wear Studies on Lubricants and Materials Applicable to MEMS," Proc. IEEE Micro Electro Mechanical Systems, Nara, Japan, 30 January-2 February, pp. 143-147.
17. Den, K., and Ko, W. H., 1992, "Application of Diamond-like Carbon Film for Microdynamic Devices," Proc. IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, 22-25 June, pp. 98-101.
18. Houston, M. R., Howe, R. T., Komvopoulos, K., and Maboudian, R., 1995, "Diamond-Like Carbon Films for Silicon Passivation in Microelectromechanical Devices," Mater. Res. Soc. Symp. Proc., 383, pp. 391-402.
19. Tsumaki, N., 2000, "Semiconductor Manufacturing Equipment," Journal of Japanese Society of Tribologists, 45, pp. 932-935.
20. Prioli, R., Zanette, S. I., Caride, A. O., Franceschini, D. F., and Freire, F. L. Jr., 1996, "Atomic Force Microscopy of Amorphous Hydrogenated Carbon-nitrogen Film Deposited by Radio-frequency-plasma Decomposition of Methane-Ammonia Gas Mixtures," J. Vac. Sci. Technol. A, A14, pp. 2351-2355.
21. Koskinen, J., Hirvonen, J. P., Levoska, J., and Torri, P., 1996, "Tribological Characterization of Carbon-Nitrogen Coatings Deposited by Using Vacuum Arc Discharge," Diamond Relat. Mater., 5, pp. 669-673.
22. Cutiongco, E. C., Li, D., Chung, Y. W., and Bhatia, C. S., 1996, "Tribological Behavior of Amorphous Carbon Nitride Overcoats for Magnetic Thin-Film Rigid Disks," ASME J. Tribol., 118, pp. 543-548.
23. Hajek, V., Rusnak, K., Vlcek, J., Martinu, L., and Hawthorne, H. M., 1997, "Tribological Study of CNx Films Prepared by Reactive d.c. Magnetron Sputtering," Wear, 213, pp. 80-89.
24. Wang, D. F., and Kato, K., 1998, "Friction Studies of Ion Beam Assisted Carbon Nitride Coating Sliding Against Diamond Pin in Water Vapor," Wear. 217, pp. 307-311.
25. Wang, D. F., Kato, K., and Umehara, N., 2000, "Mechanical Characterization and Tribological Evaluation of Ion-Beam-Assisted Sputter Coatings of Carbon With Nitrogen Incorporation," Surf. Coat. Technol., 123, pp. 177-184.
26. Khurshudov, A., Kato, K., and Koide, H., 1997, "Wear of the AFM Diamond Tip Sliding Against Silicon," Wear, 203-204, pp. 22-27.
27. Sundararajan, S., and Bhushan, B., 1999, "Micro/Nanotribology of Ultra-Thin Amorphous Carbon Coatings Using Atomic Force/Friction Force Microscopy," Wear, 225-229, pp. 678-689.
28. Stachowiak, G. W., 1997, "Numerical Characterization of Wear Particle Morphology and Angularity of Particles and Surfaces," New Directions in Tribology, Hutchings, I. M., eds., MEP Publications Ltd., pp. 371-389.
29. Stachowiak, G. W., 1998, "Particle Angularity and Its Relationship to Abrasive and Erosive Wear," Proc. 5th International Tribology Conference in Australia (AUSTRIB'98-Tribology at Work). Hargreaves, D. J., and Scott, W., eds., pp. 465-470.
30. Wang, D. F., and Kato, K., 2002, "In-Situ Examination of Wear Particle Generation in Carbon Nitride Coatings by Repeated Sliding Contact against a Spherical Diamond," Wear, 253, pp. 519-526.
31. Gabriel, K. J., Behi, F., Mahadevan, R., and Mehregany, M., 1990, "In Situ Friction and Wear Measurements in Integrated Poly-Silicon Mechanisms," Sens. Actuators, A21-A23, pp. 184-188.