Tribological properties of a-C : N and a-C films prepared by shielded arc ion plating

Vacuum

Volumn 59, Issue 2-3, 2000, Pages 567-573

  Tajima, N ^a   Saze, H ^a   Sugimura, H ^a   Takai, O ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001634720     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(00)00317-1     Document Type: Article

References (20)

1. Special issue on diamond and DLC films, Diamond Films and Technol 1994;3:3.
2. McKenzie DR. Rep Prog Phys 1996;59:1611.
3. Robertson J. Prog Solid Chem 1991;21:199.
4. Liu AY, Cohen ML. Science 1989;245:841.
5. Liu AY, Wentzcovitch RM. Phys Rev B 1994;50:10362.
6. Taki Y, Kitagawa T, Takai O. Thin Solid Films 1997;304:183.
7. Muller DE, et al. J Mater Eng Performance 1994;27:139.
8. Gupta BK. Bharat Bhushan, Wear 1995;190:110.
9. Ganapathi SK, Riener TA. ASME J Tribol 1995;177:86.
10. Li D, Chung YW, Wong MS, Sproul WD. J Appl Phys 1997;36:230.
11. Ogata K, Chubaci JFD, Fujimoto F. J Appl Phys 1994;76:3791.
12. Chen MY, Li D, Lin X, Dravid VP, Chung YW, Wong MS, Sproul WD. J Vac Sci Technol A 1993;11:521.
13. Robertson J. Pure Appl Chem 1994;66:1789.
14. Oliver WC, Pharr GM. J Mater Res 1992;7:1564.
15. Lu W, Komvopoulos K. J Appl Phys 1999;85:2642.
16. Sjöström H, Boman M, Stafström S, Sundgren JE. Phys Rev Lett 1995;75:1336.
17. Hoffman A, Brener R, Goouzman I, Cytermann C, Geller H, Levin L, Kenny M. Diamond Relat Mater 1995;4:292.
18. Marton D, Boyd KJ, Al-Bayati AH, Todorov SS, Rabalais JW. Phys Rev Lett 1994;73:118.
19. Boyd KJ, Marton D, Todorov SS, Al-Bayati AH, Kulik J, Zuhr RA, Rabalais JW. J Vac Sci Technol A 1995;13:2110.
20. Chen LC, Yang CY, Bhusari DM, Chen KH, Lin MC, Lin JC, Chuang TJ. Diamond Related Mater 1996;5:514.