Crystallization and structural phase transformation in sub-100-nm-thick SrBi2Ta2O9 thin film

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 4 A, 2005, Pages 1928-1931

  Kohno, Atsushi ^a   Sakamoto, Hideo ^a,b   Matuo, Kazuhiro ^a  

^a FUKUOKA UNIVERSITY   (Japan)

^b RENESAS TECHNOLOGY CORP   (Japan)

Author keywords

Aurivillius structure; Crystallization; Ferroelectric thin films; Fluorite structure; Grain growth; SrBi2Ta2O9 (SBT); Structural transformation

Indexed keywords

CRYSTALLIZATION; FERROELECTRIC THIN FILMS; FIELD EFFECT TRANSISTORS; GRAIN GROWTH; PHASE TRANSITIONS; SOL-GELS; STRONTIUM COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

AURIVILLIUS STRUCTURE; FLUORITE STRUCTURE; SOLID-STATE CRYSTALLIZATION; STRUCTURAL TRANSFORMATION;

THIN FILMS;

EID: 21244462755     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.44.1928     Document Type: Article

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