Crystallization of Sub-100 nm-thick Bi4-xLaxTi 3O12 films on silicon substrates and their electrical properties

Materials Research Society Symposium - Proceedings

Volumn 784, Issue , 2003, Pages 497-502

  Kohno, Atsushi ^a   Ishitsu, Fumitake ^a   Matuo, Kazuhiro ^a   Tomari, Hiroyuki ^a  

^a FUKUOKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COMPUTER SIMULATION; CRYSTALLIZATION; SILICON; SUBSTRATES; THERMAL EFFECTS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

CRYSTAL DIMENSIONS; METAL-FERROELECTRIC SEMICONDUCTORS (MFS); X RAY REFLECTION (XRR);

BISMUTH COMPOUNDS;

EID: 2942687781     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-784-c11.2     Document Type: Conference Paper

References (17)

1. C.A-Paz. de Araujo, J.D. Cuchiaro, L.D. McMillan, M.C. Scott, and J.F. Scott, Nature 374, 627-629 (1995).
2. T. Kijima, S. Satoh, H. Matsunaga, and M. Koba, Jpn. J. Appl. Phys. 35, 1246-1250 (1996).
3. B.H. Park, B.S. Kang, S.D. Bu, T.W. Noh, J. Lee, and W. Jo, Nature 401, 682 (1999).
4. T. Watanabe, H. Funakubo, M. Osada, Y. Noguchi and M. Miyayama, Appl. Phys. Lett. 80, 100-102 (2002).
5. Y. Shimakawa, Y. Kubo, Y. Tauchi, H. Asano, T. Kamiyaina, F. Izumi and Z. Hiroi, Appl. Phys. Lett. 79, 2791-2793 (2001).
6. U. Chon, G.-C. Yi and H.M. Jang, Appl. Phys. Lett. 78, 658-660 (2001).
7. Y.-M. Sun, Y.-C. Chen, J.-Y. Gan, and J.-C. Hwang, Appl. Phys. Lett. 81, 3221-3223 (2002).
8. E. Rokuta, Y. Hotta, T. Kubota, H. Tabata, H. Kobayashi, and T. Kawai, Appl. Phys. Lett. 79, 403-405 (2001).
9. L. Fu, K. Liu, B. Zhang, J. Chu, H. Wang, and M. Wang, Appl. Phys. Lett. 72, 1784-1786 (1998).
10. Y. Hou, X.-H. Xu, H. Wang, M. Wang, and S.-X. Shang, Appl. Phys. Lett. 78, 1733-1735 (2001).
11. T. Choi, Y. S. Kim, C. W. Yang, and J. Lee, Appl. Phys. Lett. 79, 1516-1518 (2001).
12. S.-Y. Chen, C.-L. Sun, S.-B. Chen, and A. Chin, Appl. Phys. Lett. 80, 3168-3170 (2002).
13. T. Kijima, Y. Fujisaki and H. Ishiwara, Jpn. J. Appl. Phys. 40, 2977-2982 (2001).
14. P. C. Joshi and S. B. Krupanidhi, J. Appl. Phys. 72, 5827-5833 (2001).
15. A. Kohno, H. Sakamoto, F. Ishitsu, and K. Matuo, Trans. Mat. Res. Soc. Jpn. 28 (2003), 1203-1206.
16. M. H. Francombe, Thin Solid Films 13, 413-433 (1972).
17. N. Maffei and S. B. Kzupanidhi, Appl. Phys. Lett. 60, 781-783 (1992).