Effects of annealing in Ar gas on ferroelectric properties of SrBi2Ta2O9 thin films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 5 A, 1998, Pages 2559-2564

  Ohfuji, Shin Ichi ^a   Itsumi, Manabu ^a  

^a NTT CORPORATION   (Japan)

Author keywords

Anneal; Ferroelectrics; Spin coat; SrBi2Ta2O9 (SBT); Thin film

Indexed keywords

ANNEALING; ARGON; BISMUTH COMPOUNDS; OXIDES; STRONTIUM COMPOUNDS; THIN FILMS;

SPIN-COAT;

FERROELECTRIC MATERIALS;

EID: 0032067092     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.2559     Document Type: Article

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