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Japanese Journal of Applied Physics, Part 2: Letters

Volumn 44, Issue 12-15, 2005, Pages

Analysis of layer structure variation of periodic porous silicon multilayer

(6) Maehama, Takehiro a Teruya, Tatsuji a Moriyama, Yuki a Sonegawa, Tomihiro a Higa, Akira a Toguchi, Minoru a

a UNIVERSITY OF THE RYUKYUS (Japan)

Author keywords

Layer thickness; Periodic multilayer; Porosity; Porous silicon; Porous silicon superlattices

Indexed keywords

CURRENT DENSITY; DIFFUSION; ELECTRIC CONDUCTIVITY; ELECTROLYTES; MULTILAYERS; POROSITY; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SUPERLATTICES; X RAY DIFFRACTION ANALYSIS;

LAYER STRUCTURE; LAYER THICKNESS; PERIODIC MULTILAYERS; POROUS SILICON SUPERLATTICES;

POROUS SILICON;

EID: 20444464518 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.44.L391 Document Type: Article

Times cited : (10)

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