Thickness dependence of Pb(Zr0.52Ti0.48)O3 films prepared by pulsed laser deposition

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 6 A, 2002, Pages 3817-3821

  Kim, Min Chul ^a,b   Choi, Ji Won ^a,b   Yoon, Seok Jin ^a,b   Yoon, Ki Hyun ^a,b   Kim, Hyun Jai ^a,b  

^a Korea Institute of Science and Technology   (South Korea)

^b Yonsei University   (South Korea)

Author keywords

Dielectric properties; Microstructure; Pb(Zr0.52Ti0.48)O3; Preferred orientation; Pulsed laser deposition; Single process

Indexed keywords

ANNEALING; CERAMIC MATERIALS; CRYSTAL ORIENTATION; CRYSTALLIZATION; FERROELECTRICITY; FILM PREPARATION; LEAD COMPOUNDS; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; PERMITTIVITY; PHASE TRANSITIONS; PULSED LASER DEPOSITION;

LEAD ZIRCONATE TITANATE; PREFERRED ORIENTATION; SINGLE PROCESSES;

THIN FILMS;

EID: 0036614185     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.3817     Document Type: Article

References (21)