Residual stress effects in ferroelectric thin films

Materials Research Society Symposium - Proceedings

Volumn 784, Issue , 2003, Pages 29-34

  Berfield, T A ^a   Sottos, N R ^a   Ong, R J ^a   Payne, D A ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FERROELECTRIC MATERIALS; GRAIN SIZE AND SHAPE; INTERFACES (MATERIALS); LITHOGRAPHY; PERMITTIVITY; RESIDUAL STRESSES; TENSILE STRESS; THERMAL EFFECTS;

COMPOSITIONAL CONTROLS; INTERFACE EFFECTS; THIN FILM DEPOSITION;

THIN FILMS;

EID: 2942655439     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-784-c3.2     Document Type: Conference Paper

References (18)

1. J.F. Li., D.D. Viehland, T. Tani, C.D.E. Lakeman, and D.A. Payne. J. Appl. Phys., 75, 4424 (1994).
2. S. Trolier-McKinstry, et al., MRS Symposium- Proceedings, 433, Ferroelectric Thin Films 363 (1996).
3. P. Wang, et al., Piezoelectrics and Acoustooptics 20, 54 (1998).
4. M. Ichiki, J. Akedo, A. Schroth, R. Maeda and Y. Ishikawa: Jpn. J. Appl. Phys. 36 (1997).
5. Z. Surowiak, H. Zajosz, and R. Dytry, Thin Solid Films 51, 359 (1978).
6. K.D. Budd, S.K. Dey, and D.A. Payne, Br. Ceram. Proc. 36, 107 (1985).
7. th IEE Int. Symposium on Applications of Ferroelectrics, New York, 161 (1996).
8. G.A.C.M. Spierings, G.J.M. Dormans, W.G.J. Moors, and M.J.E. Ulenaers, J. Appl. Phys. 78, 1926 (1995).
9. L. Lian, and N.R. Sottos, J. Appl. Phys. 95, 629 (2004).
10. C. D. E. Lakeman and D. A. Payne, J. Am. Ceram. Soc. 75, 3091 (1992).
11. T. Tani and D. A. Payne, J. Am. Ceram. Soc. 77, 1242 (1994).
12. G. G. Stoney, Proc. R. Soc. London A 82, 172 (1909).
13. L. Lian and N.R. Sottos, J. Appl. Phys. 87, 3941 (2000).
14. H. Maiwa, and N. Ichinose, Jpn. J. Appl. Phys, 42, 4392 (2003).
15. J. Hong, and H.W. Song, J. Appl. Phys, 92, 7434 (2002).
16. th IEEE Int. Symposium on Applications of Ferroelectrics, New York, 344 (1992).
17. G. Teowee, et al., MRS Symposium- Proceedings, 493, Ferroelectric Thin Films 439 (1998).
18. D. Damjanovic, D.V. Taylor, N. Setter, MRS Symposium- Proceedings, 595 Ferroelectric Thin Films 529 (2000).