Fabrication of PZT micro devices using a high yield sol-gel process

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5650, Issue , 2005, Pages 180-188

  Hu, Min ^a   Du, Hejun ^b   Xie, Jin ^b   Ling, Shih Fu ^b   Fu, Yongqing ^c  

^a UNIVERSITY OF FREIBURG   (Germany)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Micromachining; Piezoelectric micro devices; PZT thin film deposition; Sol gel process

Indexed keywords

CHEMICAL SOLUTION DEPOSITION (CSD); PIEZOELECTRIC MICRO DEVICES; PZT THIN FILM DEPOSITION; SOL-GEL PROCESSES;

BIOSENSORS; DEPOSITION; DIFFUSION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NANOTECHNOLOGY; PYROLYSIS; SINTERING; SOL-GELS; THIN FILMS;

PIEZOELECTRIC DEVICES;

EID: 20344379211     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.581395     Document Type: Conference Paper

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