Piezoelectric thin films formed by MOD on cantilever beams for micro sensors and actuators

Microsystem Technologies

Volumn 10, Issue 2, 2004, Pages 137-141

  Cui, T ^a   Markus, D ^b   Zurn, S ^b   Polla, D L ^b  

^a LOUISIANA TECH UNIVERSITY   (United States)

^b UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ANNEALING; CANTILEVER BEAMS; DEPOSITION; LEAD COMPOUNDS; MICROMACHINING; MICROSENSORS; PIEZOELECTRIC MATERIALS; PLATINUM; SILICON; STRESS ANALYSIS; SUBSTRATES;

METALORGANIC DEPOSITION (MOD); PIEZOELECTRIC THIN FILMS;

THIN FILMS;

EID: 1142276131     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-003-0319-6     Document Type: Article

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