Development of novel PZT thin films for active sliders based on head load/unload on demand systems

Microsystem Technologies

Volumn 8, Issue 2-3, 2002, Pages 133-138

  Tagawa, N ^a   Seki, H ^b   Kitamura, K ^a   Mori, A ^a  

^a KANSAI UNIVERSITY   (Japan)

^b HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRIC POTENTIAL; ELECTRODES; FERROELECTRICITY; MICROACTUATORS; MICROMACHINING; PERFORMANCE; PIEZOELECTRICITY; SILICA; SOL-GELS; SPUTTERING; STRAIN; THIN FILMS;

FABRICATION PROCESSES;

MAGNETIC RECORDING;

EID: 0036575557     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-001-0124-z     Document Type: Conference Paper

References (12)

1. Surface morphology of lead-based thin films and their properties
2. Analysis of bouncing vibrations of a 2-DOF model of tripad contact slider over a random wavy disk surface
3. An experimental investigation for continuous contact recording technology
4. 3 microcantilever for dynamic scanning force microscopy
5. Development of a piezoelectric self-excitation and self-detection mechanism in PZT microcantilevers for dynamic scanning force microscopy in liquid
6. Lead zirconate titanate (PZT) thin film deposition in facing target sputtering
7. A micro-machined dual slider-suspension for near-contact and contact recording
8. 3 thin films
9. Dynamics for micromachined mother ship negative pressure slider bearings with an integrated microsuspension mechanism in proximity magnetic recording
10. Micromachined active contact sliders based on PZT thin film microactuators for ultrahigh density magnetic disk storage
11. Lubricant design for contact recording systems
12. An active slider for practical contact recording