Development of microfabrication technology for MEMS/MOEMS applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5641, Issue , 2004, Pages 179-187

  Zheng, Cui ^a  

^a RUTHERFORD APPLETON LABORATORY   (United Kingdom)

Author keywords

MEMS; Micromachining; Standardization

Indexed keywords

ACCELEROMETERS; CMOS INTEGRATED CIRCUITS; ETCHING; FABRICATION; INTEGRATED CIRCUITS; MICROLENSES; MICROMACHINING; MIRRORS; POLYSILICON; SEMICONDUCTING SILICON; SILICON WAFERS; SOL-GELS; STANDARDIZATION;

MICROELECTROMECHANCAL SYSTEMS (MEMS); MOEMS; SEMICONDUCTOR INDUSTRY; SILICON ACCELEROMETERS;

MICROELECTROMECHANICAL DEVICES;

EID: 20044375783     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.581272     Document Type: Conference Paper

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