Bulk micromachined silicon comb-drive electrostatic actuators with diode isolation

Sensors and Actuators, A: Physical

Volumn 63, Issue 1, 1997, Pages 61-67

  Syms, R R A ^a   Hardcastle, B M ^a   Lawes, R A ^b  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b RUTHERFORD APPLETON LABORATORY   (United Kingdom)

Author keywords

Bulk micromachining; Comb drive electrostatic actuators; Diode isolation; Silicon

Indexed keywords

ANISOTROPY; BORON; DIFFUSION IN SOLIDS; ELECTRODES; ELECTROSTATIC DEVICES; ION IMPLANTATION; MICROMACHINING; REACTIVE ION ETCHING; SILICON WAFERS; SINGLE CRYSTALS;

ELECTROSTATIC ACTUATORS;

ACTUATORS;

EID: 0031236959     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80429-3     Document Type: Article

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