Microfabrication of ultra-thick SU-8 photoresist for microengines

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4979, Issue , 2003, Pages 105-110

  Jin, Peng ^a   Jiang, Kyle ^a   Sun, Nianjun ^a  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

Actuator; High aspect ratio; Microengine; Transmission spectra; Ultra thick SU 8 photoresist

Indexed keywords

ASPECT RATIO; CARBON DIOXIDE; INTERNAL COMBUSTION ENGINES; LIGHT ABSORPTION; OPTICAL PROPERTIES; OPTIMIZATION; PHOTOLITHOGRAPHY; PHOTORESISTS;

ENGINE DESIGN; MICROENGINES; MICROFABRICATION; MICRORECIPROCATING ENGINE PARTS; ULTRAVIOLET LITHOGRAPHY;

MICROELECTROMECHANICAL DEVICES;

EID: 0042564474     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.478248     Document Type: Conference Paper

References (11)

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