Influence of the radiofrequency plasma beam addition on the properties of pulsed laser deposited films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5448, Issue PART 1, 2004, Pages 136-143

  Dinescu, G ^a   Matei, D ^a   Brodoceanu, D ^a   Scarisoreanu, N ^a   Morar, M ^a   Verardi, P ^b   Craciun, F ^b   Toma, O ^c   Pedarnig, J D ^d   Dinescu, M ^a  

^a NATIONAL INSTITUTE FOR LASER   (Romania)

^b CNR   (Italy)

^c UNIVERSITY OF BUCHAREST   (Romania)

^d JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

Dielectric properties; Ferroelectric film; Pulsed laser deposition; Radiofrequency plasma beam

Indexed keywords

BEAM PLASMA INTERACTIONS; DIELECTRIC PROPERTIES; FERROELECTRIC THIN FILMS; LASER PULSES; OXIDATION; RADIOFREQUENCY SPECTROSCOPY; STOICHIOMETRY; THIN FILMS;

IONIZED OXYGEN SPECIES; METASTABLE MATERIALS; PLASMA CONTRIBUTION; RADIOFREQUENCY PLASMA BEAMS;

PULSED LASER DEPOSITION;

EID: 19944428516     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.548256     Document Type: Conference Paper

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